Steps Toward Successful HGS® Implementation

Because HGS® is such a dramatic shift in conventional chamber processing methods, and because the impact of HGS® technology is so significant, it often requires that a variety of Fab Operating, Process and Financial personnel become familiar with the technology and have a Q & A session.  After the orientation, the entire group will have a proper understanding of the technology, and its financial impact, to determine where they would like to start.


Consequently, our most successful customers have invested in an initial 1 to 2 hour HGS® project team that championed the implementation of HGS®. At a minimum, the teams typically consist of an Equipment Engineer and an Equipment Technician from each tool group wanting to implement HGS®. The teams are often supported by a single representative from Facilities Engineering.
Establishment of the HGS technology team


After the orientation, our most successful customers have selected an HGS® project team that championed the implementation of HGS®. At a minimum, the teams typically consist of an Equipment Engineer and an Equipment Technician from each tool group wanting to implement HGS®. The teams are often supported by a single representative from Facilities Engineering.

 
Orientation at Galiso

The team attends a 3-day intensive seminar at Galiso's Colorado facility that covers HGS® application issues. The background received at the seminar greatly assists in the quick implementation of HGS® at the Fab. The Following topics are addressed.
  • Tool conductance limitations, gas flow path, entry and exit locations, analytical instrumentation requirements, and utility requirements.
  • Tool pressure and temperature interlocks, the capacity of the rough pump, N2 gas flow pressure and volumes, and IO requirements, are discussed in relation to how and when HGS® is to be run on the tools. PLC requirements are also addressed.
  • The project team receives hands-on experience operating HGS® on a tool chamber. The ability of HGS® to remove particulate and moisture is demonstrated.
HGS Application Assessment and Facilitation
During the first few HGS® applications, most customer have found it very beneficial to have one of Galiso's Field Engineers come to the Fab to assess the specific tool to which HGS® is to be adapted. We typically meet with the Team to ensure that the HGS® kit and the facility requirements are properly defined for the specific tool receiving the HGS® unit.

Each tool is then facilitated by the customer, per the requirements defined during the Orientation at Galiso and the Application Assessment. This effort involves the installation of short runs of vacuum piping from the HGS unit to the chamber entry point, electrical power supply, CDA and N2 supply, and the installation of the HGS® kit.
HGS Start-up Services


Once the tool sets are facilitated, Galiso will conduct the initial start-up and characterization of HGS® on the tool. This effort typically requires a minimum of 3 days for tools with 1 type of chamber, and 1 additional day per each different chamber type on the tool. When the characterization is done, the proper HGS® flows, pressures, and process times have been defined and an "on demand" optimized HGS® processing recipe is now available for the tool.